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References (18)
-
A. Authier (2001)
Dynamical theory of x-ray diffraction -
Nesterets, Punegov (2000)
The statistical kinematical theory of X-ray diffraction as applied to reciprocal-space mappingActa crystallographica. Section A, Foundations of crystallography, 56 (Pt 6)
-
K. Lonsdale (1971)
X-Ray DiffractionNature, 233
-
J. Nolan (1998)
Parameterizations and modes of stable distributionsStatistics & Probability Letters, 38
-
L. Kirste, K. Pavlov, S. Mudie, V. Punegov, N. Herres (2005)
Analysis of the mosaic structure of an ordered (Al,Ga)N layerJournal of Applied Crystallography, 38
-
V. Ratnikov, R. Kyutt, T. Shubina, T. Paskova, E. Valcheva, B. Monemar (2000)
Bragg and Laue x-ray diffraction study of dislocations in thick hydride vapor phase epitaxy GaN filmsJournal of Applied Physics, 88
-
A. Boulle, O. Masson, R. Guinebretière, A. Lecomte, A. Dauger (2002)
A high-resolution X-ray diffractometer for the study of imperfect materialsJournal of Applied Crystallography, 35
-
C. Thompson (1990)
Grain Growth in Thin FilmsAnnual Review of Materials Science, 20
-
V. Holý, K. Wolf, M. Kastner, H. Stanzl, W. Gebhardt (1994)
X-ray triple-crystal diffractometry of defects in epitaxic layersJournal of Applied Crystallography, 27
-
R. James (1948)
The Optical principles of the diffraction of X-rays -
V. Holý, U. Pietsch, T. Baumbach (2004)
High-Resolution X-Ray Scattering: From Thin Films to Lateral Nanostructures -
W. Feller (1959)
An Introduction to Probability Theory and Its Applications -
A. Boulle, O. Masson, R. Guinebretière, A. Dauger (2003)
A new method for the determination of strain profiles in epitaxic thin films using X‐ray diffractionJournal of Applied Crystallography, 36
-
V. Holý, J. Li, G. Bauer, F. Schäffler, Howard Herzog (1995)
Diffuse x‐ray scattering from misfit dislocations in SiGe epitaxial layers with graded Ge contentJournal of Applied Physics, 78
-
M. Schmidbauer (2004)
X-Ray Diffuse Scattering from Self-Organized Mesoscopic Semiconductor Structures -
P. Scardi, M. Leoni (2001)
Diffraction line profiles from polydisperse crystalline systems.Acta crystallographica. Section A, Foundations of crystallography, 57 Pt 5
-
M. Woolfson (1971)
Theory of X-ray and thermal-neutron scattering by real crystals -
V. Kaganer, R. Köhler, M. Schmidbauer, R. Opitz, B. Jenichen (1997)
X-ray diffraction peaks due to misfit dislocations in heteroepitaxial structuresPhysical Review B, 55
- Publisher
- Wiley
- Copyright
- Copyright © 2006 Wiley Subscription Services, Inc., A Wiley Company
- ISSN
- 0108-7673
- eISSN
- 1600-5724
- DOI
- 10.1107/S0108767305037657
- pmid
- 16371699
- Publisher site
- See Article on Publisher Site
Abstract
A development is presented that allows the simulation of reciprocal‐space maps (RSMs) of epitaxic thin films exhibiting fluctuations in the size and shape of the crystalline domains over which diffraction is coherent (crystallites). Three different crystallite shapes are studied, namely parallelepipeds, trigonal prisms and hexagonal prisms. For each shape, two cases are considered. Firstly, the overall size is allowed to vary but with a fixed thickness/width ratio. Secondly, the thickness and width are allowed to vary independently. The calculations are performed assuming three different size probability density functions: the normal distribution, the lognormal distribution and a general histogram distribution. In all cases considered, the computation of the RSM only requires a two‐dimensional Fourier integral and the integrand has a simple analytical expression, i.e. there is no significant increase in computing times by taking size and shape fluctuations into account. The approach presented is compatible with most lattice disorder models (dislocations, inclusions, mosaicity, …) and allows a straightforward account of the instrumental resolution. The applicability of the model is illustrated with the case of an yttria‐stabilized zirconia film grown on sapphire.
Journal
Acta Crystallographica Section A Foundations of Crystallography – Wiley
Published: Jan 1, 2006
Keywords: ; ;