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A.M. Khoviv, A.S. Sidorkin, S.O. Yatsenko, O.B. Yatsenko (1998)
Preparation of Ferroelectric Lead Titanate FilmsNeorg. Mater., 34
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A. Khoviv, A. Sidorkin, S. Yatsenko, O. Yatsenko (1998)
Preparation of ferroelectric lead titanate filmsInorganic Materials, 34
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Thin Pb–Ti–O films on single-crystal Si were prepared by magnetron sputtering followed by thermal oxidation of Pb/Ti/Si and Ti/Pb/Si structures. Oxidation of Pb/Ti bilayers was found to yield lead oxides, which then react with Ti to form lead titanate. Ti/Pb bilayers on Si could be converted into stoichiometric lead titanate, through titanium and lead oxides, by oxidation between 870 and 1070 K. Some of the films exhibited ferroelectric properties.
Inorganic Materials – Springer Journals
Published: Oct 8, 2004
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