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S. Chowdhury, B. Haque, J. Gillespie (2016)
Molecular dynamics simulations of the structure and mechanical properties of silica glass using ReaxFFJournal of Materials Science, 51
A Stukowski (2010)
Visualization and analysis of atomistic simulation data with OVITO-the open visualization toolModel Simul Mater Sci Eng, 18
S. Goel, A. Kovalchenko, A. Stukowski, G. Cross (2016)
Influence of microstructure on the cutting behaviour of siliconActa Materialia, 105
S. Goel, Nadimul Faisal, Xichun Luo, Jiwang Yan, Anupam Agrawal (2014)
Nanoindentation of polysilicon and single crystal silicon: Molecular dynamics simulation and experimental validationJournal of Physics D: Applied Physics, 47
Fei Wang, Jianing Li, P. Huang, W. Wang, T. Lu, K. Xu (2013)
Nanoscale creep deformation in Zr-based metallic glassIntermetallics, 38
Juan Chen, Junqin Shi, Zhi Chen, Meng Zhang, Weixiang Peng, Liang Fang, Kun Sun, Jing Han (2018)
Mechanical properties and deformation behaviors of surface-modified silicon: a molecular dynamics studyJournal of Materials Science, 54
Z. Cao, Xin Zhang (2007)
Nanoindentation creep of plasma-enhanced chemical vapor deposited silicon oxide thin filmsScripta Materialia, 56
Min Lim, P. Heide, S. Perry, H. Galloway, D. Koeck (2004)
Microscopic investigations of chemo-mechanical polishing of tungstenThin Solid Films, 457
E. Estragnat, G. Tang, H. Liang, S. Jahanmir, P. Pei, J. Martín (2004)
Experimental investigation on mechanisms of silicon chemical mechanical polishingJournal of Electronic Materials, 33
C. Schuh, A. Lund (2003)
Atomistic basis for the plastic yield criterion of metallic glassNature Materials, 2
Shijun Zhao, J. Xue (2015)
Modification of graphene supported on SiO2 substrate with swift heavy ions from atomistic simulation pointCarbon, 93
Byung-Gil Yoo, Kyu‐Sik Kim, Jun-Hak Oh, U. Ramamurty, J. Jang (2010)
Room temperature creep in amorphous alloys: Influence of initial strain and free volumeScripta Materialia, 63
Junqin Shi, Juan Chen, Xinqi Wei, Liang Fang, Kun Sun, Jiapeng Sun, Jing Han (2017)
Influence of normal load on the three-body abrasion behaviour of monocrystalline silicon with ellipsoidal particleRSC Advances, 7
Min Wu, Yunfeng Liang, J. Jiang, J. Tse (2012)
Structure and Properties of Dense Silica GlassScientific Reports, 2
R. Bhowmick, R. Raghavan, K. Chattopadhyay, U. Ramamurty (2006)
Plastic flow softening in a bulk metallic glassActa Materialia, 54
T. Taylor, C. Barrett (1972)
Creep and recovery of silicon single crystalsMaterials Science and Engineering, 10
Y. Gerbig, C. Michaels, R. Cook (2016)
In situ observations of Berkovich indentation induced phase transitions in crystalline silicon films.Scripta materialia, 120 2016
B. Bhushan (2007)
Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devicesMicroelectronic Engineering, 84
J. Wang, A. Rajendran, A. Dongare (2015)
Atomic scale modeling of shock response of fused silica and α-quartzJournal of Materials Science, 50
A. Argon (1979)
Plastic deformation in metallic glassesActa Metallurgica, 27
S. Munetoh, T. Motooka, K. Moriguchi, A. Shintani (2007)
Interatomic potential for Si–O systems using Tersoff parameterizationComputational Materials Science, 39
W. Fu, Chao-Chang Chen, Yan-De Lin, Yong‐Qing Chang, Yao-Hong Huang (2011)
Passivation layer effect on surface integrity induced by Cu-CMPThin Solid Films, 519
A. Yavari, A. Moulec, A. Inoue, N. Nishiyama, N. Lupu, E. Matsubara, W. Botta, G. Vaughan, M. Michiel, A. Kvick (2005)
Excess free volume in metallic glasses measured by X-ray diffractionActa Materialia, 53
Juan Chen, Liang Fang, Kun Sun, Jing Han (2020)
Creep behaviors of surface-modified silicon: A molecular dynamics studyComputational Materials Science, 176
Ovsyannikov Sergey, Shchennikov Vladimir, Todo Sakae, Uwatoko Yoshiya (2008)
6GPa付近の圧力下におけるFe 3 O 4 マグネタイトの新しいクロスオーバ:’理想’逆立方晶スピネルへの変調かJournal of Physics: Condensed Matter, 20
C. Wang, Q. Cao, X. Wang, D. Zhang, S. Qu, J. Jiang (2017)
Time-dependent shear transformation zone in thin film metallic glasses revealed by nanoindentation creepJournal of Alloys and Compounds, 696
Jiapeng Sun, A. Ma, Jinghua Jiang, Jing Han, Ying Han (2016)
Orientation-dependent mechanical behavior and phase transformation of mono-crystalline siliconJournal of Applied Physics, 119
S. Plimpton (1993)
Fast parallel algorithms for short-range molecular dynamicsJournal of Computational Physics, 117
Jin Xu, Jianbin Luo, Luoxin Wang, Xinchun Lu (2007)
The crystallographic change in sub-surface layer of the silicon single crystal polished by chemical mechanical polishingTribology International, 40
Jiapeng Sun, Liang Fang, Jing Han, Ying Han, Huwei Chen, Kun Sun (2014)
Phase transformations of mono-crystal silicon induced by two-body and three-body abrasion in nanoscaleComputational Materials Science, 82
T. Kasai, B. Bhushan (2008)
Physics and tribology of chemical mechanical planarizationJournal of Physics: Condensed Matter, 20
Z. Cao, Xin Zhang (2004)
Density change and viscous flow during structural relaxation of plasma-enhanced chemical-vapor-deposited silicon oxide filmsJournal of Applied Physics, 96
T. Chudoba, F. Richter (2001)
Investigation of creep behaviour under load during indentation experiments and its influence on hardness and modulus resultsSurface & Coatings Technology, 148
Y. Gerbig, C. Michaels, A. Forster, R. Cook (2012)
In situ observation of the indentation-induced phase transformation of silicon thin filmsPhysical Review B, 85
W. Wright, T. Hufnagel, W. Nix (2003)
Free volume coalescence and void formation in shear bands in metallic glassJournal of Applied Physics, 93
Sun Jiapeng, Li Cheng, Jing Han, A. Ma, Liang Fang (2017)
Nanoindentation Induced Deformation and Pop-in Events in a Silicon Crystal: Molecular Dynamics Simulation and ExperimentScientific Reports, 7
Seong Kim, D. Asay, M. Dugger (2007)
Nanotribology and MEMSNano Today, 2
A. Stukowski (2009)
Modelling and Simulation in Materials Science and Engineering Visualization and analysis of atomistic simulation data with OVITO – the Open Visualization Tool
Juan Chen, Junqin Shi, Meng Zhang, Weixiang Peng, Liang Fang, Kun Sun, Jing Han (2018)
Effect of indentation speed on deformation behaviors of surface modified silicon: A molecular dynamics studyComputational Materials Science
Han Li, A. Ngan (2004)
Size effects of nanoindentation creepJournal of Materials Research, 19
I. Zarudi, Liangchi Zhang (1999)
Structure changes in mono-crystalline silicon subjected to indentation — yexperimental findingsTribology International, 32
Juan Chen, Junqin Shi, Yunpeng Wang, Jiapeng Sun, Jing Han, Kun Sun, Liang Fang (2018)
Nanoindentation and deformation behaviors of silicon covered with amorphous SiO2: a molecular dynamic studyRSC Advances, 8
Z. Cao, Xin Zhang (2008)
Nanoindentation stress–strain curves of plasma-enhanced chemical vapor deposited silicon oxide thin filmsThin Solid Films, 516
O. Shikimaka, A. Prisacaru, A. Burlacu (2015)
Effect of Long-Term Holding Under Contact Loading on the Specific Features of Phase Changes in SiliconMaterials Science, 51
F. Spaepen (1977)
A microscopic mechanism for steady state inhomogeneous flow in metallic glassesActa Metallurgica, 25
O. Shikimaka, A. Prisacaru, L. Bruk, Yu. Usatyi, A. Burlacu (2012)
Influence of loading holding time under quasistatic indentation on electrical properties and phase transformations of siliconSurface Engineering and Applied Electrochemistry, 48
F. Spaepen (2006)
Homogeneous flow of metallic glasses: A free volume perspectiveScripta Materialia, 54
Y. Gerbig, C. Michaels, A. Forster, J. Hettenhouser, W. Byrd, D. Morris, R. Cook (2012)
Indentation device for in situ Raman spectroscopic and optical studies.The Review of scientific instruments, 83 12
F. Priolo, T. Gregorkiewicz, M. Galli, T. Krauss (2014)
Silicon nanostructures for photonics and photovoltaics.Nature nanotechnology, 9 1
Long-lasting constant loading commonly exists in silicon-based microelectronic contact, as well as the chemical mechanical polishing area. In this work, the stress relaxation analysis of single crystal silicon coated with an amorphous SiO2\documentclass[12pt]{minimal}\usepackage{amsmath}\usepackage{wasysym}\usepackage{amsfonts}\usepackage{amssymb}\usepackage{amsbsy}\usepackage{mathrsfs}\usepackage{upgreek}\setlength{\oddsidemargin}{-69pt}\begin{document}$$_{2}$$\end{document} film is performed by varying the maximum indentation depth using molecular dynamics simulation. It is found that during holding, the applied indentation force declines sharply at the beginning and then steadily towards the end of the holding period. The stress relaxation amount of bilayer composites increases as the maximum indentation depth increases. It is also found that the deformation features of SiO2\documentclass[12pt]{minimal}\usepackage{amsmath}\usepackage{wasysym}\usepackage{amsfonts}\usepackage{amssymb}\usepackage{amsbsy}\usepackage{mathrsfs}\usepackage{upgreek}\setlength{\oddsidemargin}{-69pt}\begin{document}$$_{2}$$\end{document} film and silicon substrate during holding are inherited from the loading process. The SiO2\documentclass[12pt]{minimal}\usepackage{amsmath}\usepackage{wasysym}\usepackage{amsfonts}\usepackage{amssymb}\usepackage{amsbsy}\usepackage{mathrsfs}\usepackage{upgreek}\setlength{\oddsidemargin}{-69pt}\begin{document}$$_{2}$$\end{document} film during holding is further densified when the maximum indentation depth is equal to or less than a certain value (5.5 nm for the 0.8-nm film). The amount of generated phases and phase distributions of silicon substrate during holding are affected by the plastic deformation of silicon during loading.
"Acta Mechanica Solida Sinica" – Springer Journals
Published: Apr 8, 2021
Keywords: Nanoindentation; Stress relaxation; Single crystal silicon; Amorphous SiO2\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$_{2}$$\end{document} film; Molecular dynamics simulation
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