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Abstract Specific features of the anomalous angular dependence of the specular-reflection intensity under the condition of noncoplanar grazing X-ray diffraction in a crystal coated with an amorphous surface film were revealed and studied experimentally. The phenomenon was analyzed theoretically and its high sensitivity to the presence and the thickness of a several-nanometer-thick amorphous film was shown. The experimental data were used to determine the thickness and the density of a native oxide layer formed on the surface of a silicon single crystal.
Crystallography Reports – Springer Journals
Published: Nov 1, 2001
Keywords: Crystallography and Scattering Methods
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