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Specular reflection of X-rays under the conditions of grazing diffraction in a crystal with an amorphous surface layer

Specular reflection of X-rays under the conditions of grazing diffraction in a crystal with an... Abstract Specific features of the anomalous angular dependence of the specular-reflection intensity under the condition of noncoplanar grazing X-ray diffraction in a crystal coated with an amorphous surface film were revealed and studied experimentally. The phenomenon was analyzed theoretically and its high sensitivity to the presence and the thickness of a several-nanometer-thick amorphous film was shown. The experimental data were used to determine the thickness and the density of a native oxide layer formed on the surface of a silicon single crystal. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Crystallography Reports Springer Journals

Specular reflection of X-rays under the conditions of grazing diffraction in a crystal with an amorphous surface layer

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References (25)

Publisher
Springer Journals
Copyright
2001 MAIK "Nauka/Interperiodica"
ISSN
1063-7745
eISSN
1562-689X
DOI
10.1134/1.1420817
Publisher site
See Article on Publisher Site

Abstract

Abstract Specific features of the anomalous angular dependence of the specular-reflection intensity under the condition of noncoplanar grazing X-ray diffraction in a crystal coated with an amorphous surface film were revealed and studied experimentally. The phenomenon was analyzed theoretically and its high sensitivity to the presence and the thickness of a several-nanometer-thick amorphous film was shown. The experimental data were used to determine the thickness and the density of a native oxide layer formed on the surface of a silicon single crystal.

Journal

Crystallography ReportsSpringer Journals

Published: Nov 1, 2001

Keywords: Crystallography and Scattering Methods

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