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- Publisher
- Springer Journals
- Copyright
- Copyright © 2005 by Nature Publishing Group
- Subject
- Materials Science; Materials Science, general; Optical and Electronic Materials; Biomaterials; Nanotechnology; Condensed Matter Physics
- ISSN
- 1476-1122
- eISSN
- 1476-4660
- DOI
- 10.1038/nmat1514
- Publisher site
- See Article on Publisher Site
Abstract
Single-ion implantation enables tuning of transistor performance, one dopant atom at a time.
Journal
Nature Materials – Springer Journals
Published: Nov 1, 2005