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Preparation and characterization of spray-pyrolyzed porous SiO2 nanoparticles for low dielectric constant applications

Preparation and characterization of spray-pyrolyzed porous SiO2 nanoparticles for low dielectric... With the decreasing size of the integrated circuits, developments of materials with low dielectric constant have become an important research to solve the problems of parasitic capacitance. Thus in this study, low-cost SiO2 and polylactic acid (PLA) were used for the fabrication of SiO2/PLA hybrid films targeting capacitor applications. SiO2 nanoparticles with porous structure were prepared via spray pyrolysis with non-ionic surfactant F-127 as a pore-forming agent. In addition, surface morphology, porous structure, specific surface area, and particle porosity were examined via X-ray diffraction, scanning electron microscopy, transmission electron microscopy, and nitrogen adsorption/desorption isotherms, respectively. Then, the SiO2/PLA hybrid films were fabricated and the resulting dielectric constants were measured. Finally, the resulting morphologies and properties and the corresponding mechanisms were discussed. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Journal of the Australian Ceramic Society Springer Journals

Preparation and characterization of spray-pyrolyzed porous SiO2 nanoparticles for low dielectric constant applications

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Publisher
Springer Journals
Copyright
Copyright © Australian Ceramic Society 2021
ISSN
2510-1560
eISSN
2510-1579
DOI
10.1007/s41779-021-00629-7
Publisher site
See Article on Publisher Site

Abstract

With the decreasing size of the integrated circuits, developments of materials with low dielectric constant have become an important research to solve the problems of parasitic capacitance. Thus in this study, low-cost SiO2 and polylactic acid (PLA) were used for the fabrication of SiO2/PLA hybrid films targeting capacitor applications. SiO2 nanoparticles with porous structure were prepared via spray pyrolysis with non-ionic surfactant F-127 as a pore-forming agent. In addition, surface morphology, porous structure, specific surface area, and particle porosity were examined via X-ray diffraction, scanning electron microscopy, transmission electron microscopy, and nitrogen adsorption/desorption isotherms, respectively. Then, the SiO2/PLA hybrid films were fabricated and the resulting dielectric constants were measured. Finally, the resulting morphologies and properties and the corresponding mechanisms were discussed.

Journal

Journal of the Australian Ceramic SocietySpringer Journals

Published: Sep 1, 2021

Keywords: Spray pyrolysis; Silicon dioxide; Hybrid film; Dielectric constant; Electron microscopy

References