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- Publisher
- Springer Journals
- Copyright
- Copyright © 2015 by 3D Research Center, Kwangwoon University and Springer-Verlag Berlin Heidelberg
- Subject
- Engineering; Signal, Image and Speech Processing; Computer Imaging, Vision, Pattern Recognition and Graphics; Optics, Optoelectronics, Plasmonics and Optical Devices
- eISSN
- 2092-6731
- DOI
- 10.1007/s13319-015-0073-4
- Publisher site
- See Article on Publisher Site
Abstract
In this paper we analyzed mass and heat transport in a reactor from gas phase during growth an epitaxial layer. Based on results of the analysis we analyzed dependences of properties of grown layers on parameters of technological process.
Journal
3D Research – Springer Journals
Published: Nov 16, 2015