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References (20)
-
GJ Bottiger N Chechenin (1995)
Nanoindentation of amorphous aluminum oxide films II. Critical parameters for the breakthrough and a membrane effect in thin hard films on soft substratesThin Solid Films, 261
-
C Cheng-Hsin H Gao (1992)
Elastic contact versus indentation modeling of multi-layered materialsInt J Solids Struct, 29
-
IL Jager (2002)
Comment on: “Effects of the substrate on the determination of thin films mechanical properties by nanoindentation”Scripta Mater, 47
-
WC Oliver GM Pharr (1992)
Measurement of thin film mechanical properties using nanoindentationMRS Bulletin, 17
-
DS Rickerby PJ Burnett (1987)
The mechanical properties of wear-resistant coatings I: Modelling of hardness behaviourThin Solid Films, 148
-
DS Rickerby PJ Burnett (1987)
The mechanical properties of wear-resistant coatings. II: Experimental studies and interpretation of hardnessThin Solid Films, 148
-
JC Simo TA Laursen (1992)
A study of the mechanics of microindentation using finite elementsJ Mater Res, 7
-
WD Nix AK Bhattacharya (1988)
Finite element simulation of indentation experimentInt J Solids Struct, 24
-
WC Oliver DL Joslin (1990)
A new method for analyzing data from continuous depth-sensing microindentation testJ Mater Res, 5
-
WC Oliver BD Fabes (1992)
The determination of hardness from the composite response of film and substrate to nanometer scale indentationJ Mater Res, 7
-
GM Pharr WC Oliver (1992)
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentJ Mater Res, 7
-
WD Nix MF Doerner (1986)
A method for interpreting the data from depth-sensing indentation instrumentsJ Mater Res, 1
-
S Hogmark B Jonsson (1984)
Hardness measurements of thin filmsThin Solid Films, 114
-
WD Nix R Saha (2002)
Effects of the substrate on the determination of thin film mechanical properties by nanoindentationActa Mater, 50
-
TF Page PJ Burnett (1984)
Surface softening in silicon by ion implantationJ Mater Sci, 19
-
MV Swain JS Field (1993)
A simple predictive model for spherical indentationJ Mater Res, 8
-
JA Schweitz (1992)
Mechanical characterization of thin films by micromechanical techniquesMRS Bulletin, 17
-
Z Xue R Saha (2001)
Indentation of a soft metal film on a hard substrate: strain gradient hardening effectsJ Mech Phys Solids, 49
-
L Liu SH Chen (2004)
Size dependent nanoindentation of a soft film on a hard substrateActa Mater, 52
-
RB King (1987)
Elastic analysis of some punch problems for a layered mediumInt J Solids Struct, 23
- Publisher
- Springer Journals
- Copyright
- 2004 Chinese Society of Theoretical and Applied Mechanics
- ISSN
- 0567-7718
- eISSN
- 1614-3116
- DOI
- 10.1007/BF02489376
- Publisher site
- See Article on Publisher Site
Abstract
Abstract In the present paper, the hardness and Young's modulus of film-substrate systems are determined by means of nanoindentation experiments and modified models. Aluminum film and two kinds of substrates, i.e. glass and silicon, are studied. Nanoindentation XP II and continuous stiffness mode are used during the experiments. In order to avoid the influence of the Oliver and Pharr method used in the experiments, the experiment data are analyzed with the constant Young's modulus assumption and the equal hardness assumption. The volume fraction model (CZ model) proposed by Fabes et al. (1992) is used and modified to analyze the measured hardness. The method proposed by Doerner and Nix (DN formula) (1986) is modified to analyze the measured Young's modulus. Two kinds of modified empirical formula are used to predict the present experiment results and those in the literature, which include the results of two kinds of systems, i.e., a soft film on a hard substrate and a hard film on a soft substrate. In the modified CZ model, the indentation influence angle, φ, is considered as a relevant physical parameter, which embodies the effects of the indenter tip radius, pile-up or sink-in phenomena and deformation of film and substrate.
Journal
"Acta Mechanica Sinica" – Springer Journals
Published: Aug 1, 2004