Access the full text.
Sign up today, get DeepDyve free for 14 days.
Loading next page...
/lp/springer-journals/modeling-and-simulation-of-a-novel-vertical-actuator-based-on-i3YdN6Kgh9
References (18)
-
Clarence Miller, P. Neogi (1985)
Interfacial Phenomena: Equilibrium and Dynamic Effects -
Hyung-Hoon Kang, Joonwon Kim (2006)
EWOD (Electrowetting-on-Dielectric) Actuated Optical Micromirror19th IEEE International Conference on Micro Electro Mechanical Systems
-
J. Lienemann, A. Greiner, J. Korvink (2006)
Modeling, Simulation, and Optimization of ElectrowettingIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 25
-
M. Hyejin S.K. Cho (2003)
Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuitsJ. MEMS, 12
-
K. et al. Hoshino (2003)
Electrowetting-based actuation for microinjection. In: TRANSDUCERS Solid-State SensorsTRANSDUCERS Solid-State Sensors, 2
-
S.Y. Kwang (2001)
A micropump driven by continuous electrowetting actuation for low voltage and low power operations. In: Proc. IEEE MEMS WorkshopProc
-
W. Dai, Ya-pu Zhao (2007)
The Nonlinear Phenomena of Thin Polydimethylsiloxane (PDMS) Films in ElectrowettingInternational Journal of Nonlinear Sciences and Numerical Simulation, 8
-
K. Hoshino, S. Triteyaprasert, K. Matsumoto, I. Shimoyama (2003)
Electrowetting-based actuation for microinjectionTRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2
-
H. Verheijen, Mwj Prins (1999)
Contact angles and wetting velocity measured electricallyReview of Scientific Instruments, 70
-
Z. Xuefeng, Yue Ruifeng, Wu Jian-gang, D. Liang, Liu Litian (2004)
Actuation and Control of Droplets by Using Electrowetting-on-DielectricChinese Physics Letters, 21
-
A. Takei, E. Iwase, K. Hoshino, K. Matsumoto, I. Shimoyama (2007)
Angle-Tunable Liquid Wedge Prism Driven by ElectrowettingJournal of Microelectromechanical Systems, 16
-
S. Cho, H. Moon, C. Kim (2003)
Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuitsIEEE\/ASME Journal of Microelectromechanical Systems, 12
-
B. Feenstra, R. Hayes, R. Dijk, R. Boom, M. Wagemans, I. Camps, A. Giraldo, B. Heijden (2006)
Electrowetting-Based Displays: Bringing Microfluidics Alive On-Screen19th IEEE International Conference on Micro Electro Mechanical Systems
-
W. Dai, Ya-pu Zhao (2008)
An Electrowetting Model for Rough Surfaces Under Low VoltageJournal of Adhesion Science and Technology, 22
-
K. Yun, Il-Joo Cho, J. Bu, Geun-ho Kim, Y. Jeon, C. Kim, E. Yoon (2001)
A micropump driven by continuous electrowetting actuation for low voltage and low power operationsTechnical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
-
A. Takei (2006)
22–26 January 2006, ppProc
-
Junghoon Lee, C. Kim (2000)
Surface-tension-driven microactuation based on continuous electrowettingJournal of Microelectromechanical Systems, 9
-
G. Andreas L. Jan (2006)
Modeling, simulation, and optimization of electrowettingTrans. IEEE CAD IC SYS, 25
- Publisher
- Springer Journals
- Copyright
- 2009 The Chinese Society of Theoretical and Applied Mechanics and Springer-Verlag GmbH
- ISSN
- 0567-7718
- eISSN
- 1614-3116
- DOI
- 10.1007/s10409-009-0263-5
- Publisher site
- See Article on Publisher Site
Abstract
Abstract A novel vertical actuator based on electrowetting on dielectric (EWOD) was designed, analyzed and simulated. Modeling results indicated that the vertical driving force of the actuator obeyed a second order polynomial of applied voltage, which was verified by Covent_ware 2006. As a result, the vertical driving force of the EWOD actuator with a 1.1nL droplet and a 1.75 μm thick polymer was about 0.5 μN under an applied voltage 100V which was comparable to that of the electrostatic actuators. Moreover, the noise from plane forces we analyzed and simulated was very low. Therefore, we made a conclusion that the EWOD actuator can be used in MEMS transducer.
Journal
"Acta Mechanica Sinica" – Springer Journals
Published: Oct 1, 2009