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Integrating graphene into semiconductor fabrication lines

Integrating graphene into semiconductor fabrication lines Electronic and photonic devices based on graphene have unique properties, leading to outstanding performance figures of merit. Mastering the integration of this unconventional material into an established semiconductor fabrication line represents a critical step towards commercialization. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Nature Materials Springer Journals

Integrating graphene into semiconductor fabrication lines

Nature Materials , Volume 18 (6) – May 21, 2019

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References (27)

Publisher
Springer Journals
Copyright
Copyright © 2019 by Springer Nature Limited
Subject
Materials Science; Materials Science, general; Optical and Electronic Materials; Biomaterials; Nanotechnology; Condensed Matter Physics
ISSN
1476-1122
eISSN
1476-4660
DOI
10.1038/s41563-019-0359-7
Publisher site
See Article on Publisher Site

Abstract

Electronic and photonic devices based on graphene have unique properties, leading to outstanding performance figures of merit. Mastering the integration of this unconventional material into an established semiconductor fabrication line represents a critical step towards commercialization.

Journal

Nature MaterialsSpringer Journals

Published: May 21, 2019

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