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Genetic algorithm for solution of the inverse problem in high-resolution X-ray reflectometry

Genetic algorithm for solution of the inverse problem in high-resolution X-ray reflectometry Abstract The method of high-resolution X-ray reflectometry with application of the genetic Differential Evolution algorithm for global minimization of the error function is developed. The optimization of the computational process is performed by combining the genetic algorithm with the Levenberg-Marquardt method. This optimization reduced the computational time by a factor of 3–4. The structural properties of multilayer systems AlxGa1−x As/GaAs/AlxGa1−x As (x ∼ 0.2) grown on GaAs(001) are investigated. The density profiles along the normal to the surface are obtained and the sizes of the transition layers are determined with a resolution of 0.1–0.2 nm. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Crystallography Reports Springer Journals

Genetic algorithm for solution of the inverse problem in high-resolution X-ray reflectometry

Sutyrin, A. G.; Prokhorov, D. Yu.
Crystallography Reports , Volume 51 (4): 7 – Jul 1, 2006
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References (14)

Publisher
Springer Journals
Copyright
2006 Pleiades Publishing, Inc.
ISSN
1063-7745
eISSN
1562-689X
DOI
10.1134/S1063774506040055
Publisher site
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Abstract

Abstract The method of high-resolution X-ray reflectometry with application of the genetic Differential Evolution algorithm for global minimization of the error function is developed. The optimization of the computational process is performed by combining the genetic algorithm with the Levenberg-Marquardt method. This optimization reduced the computational time by a factor of 3–4. The structural properties of multilayer systems AlxGa1−x As/GaAs/AlxGa1−x As (x ∼ 0.2) grown on GaAs(001) are investigated. The density profiles along the normal to the surface are obtained and the sizes of the transition layers are determined with a resolution of 0.1–0.2 nm.

Journal

Crystallography Reports – Springer Journals

Published: Jul 1, 2006

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