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Excitation of Surface Acoustic Waves and Lamb Waves at Superhigh Frequencies in a Diamond-Based Piezoelectric Layered Structure

Excitation of Surface Acoustic Waves and Lamb Waves at Superhigh Frequencies in a Diamond-Based... The authors have carried out an experimental and theoretical study of the propagation of surface acoustic waves (SAW)—Rayleigh, Sezawa and SH-modes, as well as Lamb waves in Me-IDT/AlN/(100) diamond (Me = Pt, Al) piezoelectric layered structures with a SAW resonator configuration. The types of modes are identified and the dispersion curves of the phase velocities and electromechanical coupling coefficients for SAW and Lamb waves are obtained. The excitation of Lamb waves up to a frequency of 7.3 GHz was observed experimentally. The resonance curves for Lamb waves have a higher quality factor Q compared to surface acoustic waves propagating on the same substrates. At a frequency of about 7 GHz, the loaded Q-factor reaches 3400, while the quality parameter Q × f = 2.4 × 1013 Hz. An unusual effect of a significant increase in the Q-factor of Lamb waves with the frequency increasing from 760 at 1.5 GHz to 3400 at 7 GHz is noted. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Acoustical Physics Springer Journals

Excitation of Surface Acoustic Waves and Lamb Waves at Superhigh Frequencies in a Diamond-Based Piezoelectric Layered Structure

Acoustical Physics , Volume 67 (1) – Mar 10, 2021

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Publisher
Springer Journals
Copyright
Copyright © Pleiades Publishing, Ltd. 2021. ISSN 1063-7710, Acoustical Physics, 2021, Vol. 67, No. 1, pp. 38–46. © Pleiades Publishing, Ltd., 2021. Russian Text © The Author(s), 2021, published in Akusticheskii Zhurnal, 2021, Vol. 67, No. 1, pp. 45–54.
ISSN
1063-7710
eISSN
1562-6865
DOI
10.1134/S1063771021010024
Publisher site
See Article on Publisher Site

Abstract

The authors have carried out an experimental and theoretical study of the propagation of surface acoustic waves (SAW)—Rayleigh, Sezawa and SH-modes, as well as Lamb waves in Me-IDT/AlN/(100) diamond (Me = Pt, Al) piezoelectric layered structures with a SAW resonator configuration. The types of modes are identified and the dispersion curves of the phase velocities and electromechanical coupling coefficients for SAW and Lamb waves are obtained. The excitation of Lamb waves up to a frequency of 7.3 GHz was observed experimentally. The resonance curves for Lamb waves have a higher quality factor Q compared to surface acoustic waves propagating on the same substrates. At a frequency of about 7 GHz, the loaded Q-factor reaches 3400, while the quality parameter Q × f = 2.4 × 1013 Hz. An unusual effect of a significant increase in the Q-factor of Lamb waves with the frequency increasing from 760 at 1.5 GHz to 3400 at 7 GHz is noted.

Journal

Acoustical PhysicsSpringer Journals

Published: Mar 10, 2021

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