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S Hoffstetter-Kuhn (1993)
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IEEE MEMSIEEE MEMS
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11th Inter Conf on Solid-State Sensors and Actuators11th Inter Conf on Solid-State Sensors and Actuators (Transducers '01/Eurosensors XV)
Abstract A novel laser processing technique was developed for making channels in the nano regime in this paper. A Nd:YAG laser was used to dry fabricate micro channels (25μm∼100 μm diameter) in a 1 cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are smooth and with extremely high aspect ratio (∼104 depth to width ratio). A possible mechanism is proposed to explain the formation of the nano channels. This laser-based nano channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.
"Acta Mechanica Sinica" – Springer Journals
Published: Apr 1, 2004
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