Ultra-Broadband and Low-Loss Silicon-Based Power Splitter Based on Subwavelength Grating-Assisted Multimode Interference Structure
Ultra-Broadband and Low-Loss Silicon-Based Power Splitter Based on Subwavelength Grating-Assisted...
Shi, Yuchen;Shao, Bo;Zhang, Zhekang;Zhou, Taotao;Luo, Fan;Xu, Yin
2022-06-21 00:00:00
hv photonics Communication Ultra-Broadband and Low-Loss Silicon-Based Power Splitter Based on Subwavelength Grating-Assisted Multimode Interference Structure 1 1 1 1 1 1 , 2 , Yuchen Shi , Bo Shao , Zhekang Zhang , Taotao Zhou , Fan Luo and Yin Xu * Department of Electronic Engineering, School of IoT Engineering, Jiangnan University, Wuxi 214122, China; 1038190216@stu.jiangnan.edu.cn (Y.S.); 1038190215@stu.jiangnan.edu.cn (B.S.); 1038190218@stu.jiangnan.edu.cn (Z.Z.); 1038190125@stu.jiangnan.edu.cn (T.Z.); 1038190224@stu.jiangnan.edu.cn (F.L.) Institute of Advanced Technology, Jiangnan University, Wuxi 214122, China * Correspondence: yin.xu@jiangnan.edu.cn Abstract: High-performance and compact power splitters are fundamental components in on-chip photonic integrated circuits (PICs). We propose a silicon-based power splitter based on a subwave- length grating (SWG)-assisted multimode interference (MMI) structure. To shorten the device size and enhance the device performance, an inverse-tapered SWG is embedded in the central region of the MMI and two rows of uniform SWG are embedded on both sides, together with two right-angled cutting structures on the input side. According to the results, the MMI length was obviously reduced to 3.2 m (5.2 m for conventional MMI structure under the same waveguide width), while the insertion loss (IL) and reflection loss were 0.08 dB and <