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Determination of depth-dependent diffraction data: a new approach

Determination of depth-dependent diffraction data: a new approach A direct method for determining powder diffraction data at specific depths from angle-dependent diffraction data is described. The method is non-destructive and only traditional data collections, where the angle of incidence is varied, are required. These angle-dependent spectra are transformed to give diffraction data arising from different depths, which may then be exploited using any conventional method. This is a novel approach as traditional methods are forced to tolerate the inherent depth averaging of grazing-angle diffraction, or only examine specific structural characteristics. In order to obtain depth-dependent X-ray diffraction data, a Fredholm integral equation of the first kind is solved using regularization techniques. The method has been validated by the generation of pseudo-experimental data having known depth profiles and solving the Fredholm integral equation to recover the solution. The method has also been applied to experimental data from a number of thin film systems. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Acta Crystallographica Section A: Foundations of Crystallography International Union of Crystallography

Determination of depth-dependent diffraction data: a new approach

Determination of depth-dependent diffraction data: a new approach


Abstract

A direct method for determining powder diffraction data at specific depths from angle-dependent diffraction data is described. The method is non-destructive and only traditional data collections, where the angle of incidence is varied, are required. These angle-dependent spectra are transformed to give diffraction data arising from different depths, which may then be exploited using any conventional method. This is a novel approach as traditional methods are forced to tolerate the inherent depth averaging of grazing-angle diffraction, or only examine specific structural characteristics. In order to obtain depth-dependent X-ray diffraction data, a Fredholm integral equation of the first kind is solved using regularization techniques. The method has been validated by the generation of pseudo-experimental data having known depth profiles and solving the Fredholm integral equation to recover the solution. The method has also been applied to experimental data from a number of thin film systems.

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References (29)

Publisher
International Union of Crystallography
Copyright
Copyright (c) 2005 International Union of Crystallography
Subject
depth profiling, Fredholm integral equation, regularization
ISSN
0108-7673
eISSN
1600-5724
DOI
10.1107/S0108767304026881
pmid
15613761
Publisher site
See Article on Publisher Site

Abstract

A direct method for determining powder diffraction data at specific depths from angle-dependent diffraction data is described. The method is non-destructive and only traditional data collections, where the angle of incidence is varied, are required. These angle-dependent spectra are transformed to give diffraction data arising from different depths, which may then be exploited using any conventional method. This is a novel approach as traditional methods are forced to tolerate the inherent depth averaging of grazing-angle diffraction, or only examine specific structural characteristics. In order to obtain depth-dependent X-ray diffraction data, a Fredholm integral equation of the first kind is solved using regularization techniques. The method has been validated by the generation of pseudo-experimental data having known depth profiles and solving the Fredholm integral equation to recover the solution. The method has also been applied to experimental data from a number of thin film systems.

Journal

Acta Crystallographica Section A: Foundations of CrystallographyInternational Union of Crystallography

Published: Dec 22, 2004

Keywords: depth profiling; Fredholm integral equation; regularization.

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