Access the full text.
Sign up today, get DeepDyve free for 14 days.
Sun Wei (2000)
Multi-Volume CAD Modeling for Heterogeneous Object Design and FabricationJournal of Computer Science and Technology, 15
D. Teegarden, G. Lorenz, R. Neuf (1998)
How to model and simulate microgyroscope systemsIEEE Spectrum, 35
S. Wiak, K. Smółka (2007)
Object-oriented model of comb drive microactuatorArchives of Electrical Engineering, 56
P. Schwarz, J. Haase (2001)
Behavioral modeling of complex heterogeneous microsystems
S. Wiak, K. Smółka, M. Dems, K. Komeza (2006)
Numerical modeling of 3D intelligent comb drive accelerometer structure: Mechanical modelsCompel-the International Journal for Computation and Mathematics in Electrical and Electronic Engineering, 25
Purpose – The main aim of this paper is to build an equivalent circuit model of a comb drive microactuator, while the phenomenon of generating the electric fringing field at electrode edges is taken into consideration. Design/methodology/approach – The approach to the comb drives design requires the “leakage capacitance” (appearing at electrode edges) to be introduced to the complex equivalent circuit model. Introducing these capacitances leads to defining the circuit model properly. Findings – Such a complex approach by use of the equivalent circuits model could make it possible to reduce the discrepancy between the field and circuit models. These results were obtained after comparing both field and circuit models. Originality/value – MEMS microdrives are in the area which is being developed very dynamically. Improvements in the mathematical models would permit more precise microdrive design, leading to optimal structure.
COMPEL: The International Journal for Computation and Mathematics in Electrical and Electronic Engineering – Emerald Publishing
Published: Jul 11, 2008
Keywords: MEMS; Optical receivers; Switchgear
Read and print from thousands of top scholarly journals.
Already have an account? Log in
Bookmark this article. You can see your Bookmarks on your DeepDyve Library.
To save an article, log in first, or sign up for a DeepDyve account if you don’t already have one.
Copy and paste the desired citation format or use the link below to download a file formatted for EndNote
Access the full text.
Sign up today, get DeepDyve free for 14 days.
All DeepDyve websites use cookies to improve your online experience. They were placed on your computer when you launched this website. You can change your cookie settings through your browser.