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References (17)
-
S. Wiak, K. Smółka
Integrated computer models of 3‐D comb drive electrostatic MEMS structures -
V. Behjat, A. Vahedi (2006)
Minimizing the torque ripple of variable capacitance electrostatic micromotorsJournal of Electrostatics, 64
-
D. Meeker
Finite Element Method Magnetics, Version 4.2, User's Manual -
Wenming Zhang, G. Meng, Hongguang Li (2005)
Electrostatic micromotor and its reliabilityMicroelectron. Reliab., 45
-
A.A. Idris
Modeling and simulation of MEMS components: challenges and possible solutions -
P. Barba, A. Savini, S. Wiak (1994)
2-D numerical simulation of electrostatic micrometer torque -
P. Barba (2000)
Vector shape optimization of an electrostatic micromotor using a genetic algorithmCompel-the International Journal for Computation and Mathematics in Electrical and Electronic Engineering, 19
-
A. Kost
Different methods for computational electromagnetics: their characteristics and typical pratical, applications -
P. Schwarz, C. Clauß, K.‐H. Diener, G. Elst, J. Haufe, R. Jancke, A. Schneider, P. Schneider
Web‐based, simulation‐oriented training courses in electronics and microsystems technology -
10.1109/ICCAD.2002.1167560
-
D. Meeker
Finite Element Method Magnetics: OctaveFEMM, Version 1.2, User's Manual -
H.F. Vinhais, P.H. de Godoy, E.C.N. Silva
Optimized design of an electrostatic side‐drive micromotor -
S. Bart, M. Mehregany, L. Tavrow, J. Lang, S. Senturia (1992)
Electric micromotor dynamicsIEEE Transactions on Electron Devices, 39
-
F. Han, L. Wang, Q. Wu, Y. Liu (2011)
Performance of an active electric bearing for rotary micromotorsJournal of Micromechanics and Microengineering, 21
-
A. Ketabi, M. Navardi (2011)
Optimization of Variable-Capacitance Micromotor Using Genetic AlgorithmJournal of Microelectromechanical Systems, 20
-
Q. Jing, T. Mukherjee, G. Fedder (2002)
Schematic-based lumped parameterized behavioral modeling for suspended MEMSIEEE/ACM International Conference on Computer Aided Design, 2002. ICCAD 2002.
-
W. Chuang, Hsin-Li Lee, P. Chang, Yuh-Chung Hu (2010)
Review on the Modeling of Electrostatic MEMSSensors (Basel, Switzerland), 10
- Publisher
- Emerald Publishing
- Copyright
- Copyright © 2013 Emerald Group Publishing Limited. All rights reserved.
- ISSN
- 0332-1649
- DOI
- 10.1108/03321641311317022
- Publisher site
- See Article on Publisher Site
Abstract
Purpose – This paper aims to focus on the hybrid numerical method for effective design of silicon micromotor. Design/methodology/approach – In this work, the authors introduced finite element methods combined with LUA and Matlab. The paper focuses on analysis of electrostatic micromotor and uses computer simulation procedure leading to new structure design. Findings – This strategy enables changing of all parameters of the micromotors MEMS. Moreover, this strategy allows for taking advantage of FEM, namely possibility of calculations of complicated geometries (different electromagnetic devices too) without additional operations. Originality/value – A novel strategy in computer modeling of micromotor MEMS, based on the fast and very efficient hybrid method for analysis and design, is proposed.
Journal
COMPEL: The International Journal for Computation and Mathematics in Electrical and Electronic Engineering – Emerald Publishing
Published: Jul 5, 2013
Keywords: MEMS; Micromotor; Numerical methods; FEM; Matlab; Electric motors; Electromagnetism