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AbstractExisting 3D MEMS-based optical switches offergood optical properties (low insertion loss, lowcrosstalk), high reliability and low power consumption.These switches utilize highly reflective micro-mirrors tomanipulate an optical signal inside the switch directlywithout any conversions. They are used to build dynamicallyreconfigurable, highly-scalable physical optical networklayer. As indicated by the simulation results of thispaper, many of existing micro-mirror designs do not havetheir dynamic characteristics well optimized and this limitsthe switching speed of the optical switch. In a 3DMEMSswitch, the coupling between the mechanical structure(micro-mirror) and electrostatic field (electrodes) resultsin dynamic coupled rotation of the micro-mirror about itsaxes, known as the cross-axis coupling effect. The couplingnature of micro-mirror rotation makes its control difficult.In this paper,we present the simulation case studiesand a simple optimization technique leading to decoupledrotation of the micro-mirror about two perpendicular axes.This helps to reduce the switching time of the switch whilekeeping the same manufacturing process and only minimaldesign changes.
Open Computer Science – de Gruyter
Published: Jan 1, 2016
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