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Ad Anced OpticAl technO Ogies 2022 · Volume 11 · Issue 5-6 · PP. 149–214 · · 2022 O v ume 11 l sue 5-6 si Isn 219 s 2-8576 · e -Isn 219 s 2-8584 Adv Anced OpticAl technOl Ogies toPIcal Issue ellipsOmetRY p ARt 2 guest edit ORs Rüdiger Schmidt-Grund Chris Sturm Andreas Hertwig edit OR-in-chief Michael Pfeffer www.degruyter.com/aot ADVANCED OPTICAL TECHNOLOGIES EDITOR-IN-CHIEF Michael Pfeffer, Weingarten, Germany University of Applied Sciences Ravensburg-Weingarten, Germany ASSOCIATE EDITOR Allen Yi , The Ohio State University, USA EDITORIAL BOARD Stefan Bäumer, TNO Delft, Netherlands Jörn Bonse, Bundesanstalt für Materialforschung und –prüfung, Germany Robert Brunner, Ernst-Abbe-Hochschule, Jena, Germany Jan Burke, Fraunhofer IOSB, Germany Andreas Erdmann, Fraunhofer IISB, Germany Donis Flagello, Nikon RCA, USA Michael Golub, Tel Aviv University, Israel Norbert Kerwien, Carl Zeiss AG, Germany Markus Krutzik, Humboldt Universität zu Berlin, Germany Yanqiu Li, Beijing Institute of Technology, China Irina Livshits, St. Petersburg National Research University, Russia Peter Loosen, Fraunhofer ILT, Germany Douglas McCarter, McCarter Machine Inc., USA Cornelius Neumann, KIT Karlsruhe, Germany Andrew Rakich, GMTO, Germany Jan van Schoot, ASML Netherlands BV, The Netherlands Stefan Sinzinger, Technical University Ilmenau, Germany Guohai Situ, Shanghai Institute of Optics and Fine Mechanics, China Koji Sugioka,
Advanced Optical Technologies – de Gruyter
Published: Dec 1, 2022
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