Access the full text.
Sign up today, get DeepDyve free for 14 days.
D. Likhachev (2017)
Selecting the right number of knots for B-spline parameterization of the dielectric functions in spectroscopic ellipsometry data analysisThin Solid Films, 636
P. Písařík, M. Jelínek, K. Smetana, B. Dvořánková, T. Kocourek, J. Zemek, D. Chvostova (2013)
Study of optical properties and biocompatibility of DLC films characterized by sp3 bondsApplied Physics A, 112
M. Śmietana, W. Bock, J. Szmidt, J. Grabarczyk (2010)
Substrate effect on the optical properties and thickness of diamond-like carbon films deposited by the RF PACVD methodDiamond and Related Materials, 19
D. Likhachev (2015)
A practitioner's approach to evaluation strategy for ellipsometric measurements of multilayered and multiparametric thin-film structuresThin Solid Films, 595
Z. Michalewicz (1996)
Genetic Algorithms + Data Structures = Evolution Programs
G. Jellison (1993)
Data analysis for spectroscopic ellipsometryThin Solid Films, 234
D. Bruggeman (1935)
Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen SubstanzenAnnalen der Physik, 416
D. Rai, D. Datta, S. Ram, S. Sarkar, R. Gupta, Santosh Kumar (2010)
Structural, optical and secondary electron emission properties of diamond like carbon thin films deposited by pulsed-DC plasma CVD techniqueSolid State Sciences, 12
D. Likhachev (2017)
Model selection in spectroscopic ellipsometry data analysis: Combining an information criteria approach with screening sensitivity analysisApplied Surface Science, 421
K. Dorywalski, Rüdiger Schmidt-Gründ, M. Grundmann (2020)
Hybrid GA-gradient method for thin films ellipsometric data evaluationJ. Comput. Sci., 47
V. Zavaleyev, J. Walkowicz, G. Greczynski, L. Hultman (2013)
Effect of substrate temperature on properties of diamond-like films deposited by combined DC impulse vacuum-arc methodSurface & Coatings Technology, 236
G. Schwarz (1978)
Estimating the Dimension of a ModelAnnals of Statistics, 6
AbstractA method for the evaluation of experimental data from spectroscopic ellipsometry is proposed which combines the global-search optimization algorithm with statistical model selection criteria. The hybrid genetic-gradient search algorithm (HGGA) is applied to find the optical parameters and thickness of a diamond-like carbon (DLC) coating deposited on SW7M stainless steel. Akaike and Bayesian information criteria are used to evaluate the different dielectric function models. The method is able to find optical model parameters even in case of a limited initial knowledge about the material optical constants. At the same time, the optimal dielectric function model for the description of the material optical properties can be selected unambiguously from the set of candidate models.
Advanced Optical Technologies – de Gruyter
Published: Dec 1, 2022
Keywords: data evaluation; genetic algorithm; information criteria; spectroscopic ellipsometry
Read and print from thousands of top scholarly journals.
Already have an account? Log in
Bookmark this article. You can see your Bookmarks on your DeepDyve Library.
To save an article, log in first, or sign up for a DeepDyve account if you don’t already have one.
Copy and paste the desired citation format or use the link below to download a file formatted for EndNote
Access the full text.
Sign up today, get DeepDyve free for 14 days.
All DeepDyve websites use cookies to improve your online experience. They were placed on your computer when you launched this website. You can change your cookie settings through your browser.