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Combination of a global-search method with model selection criteria for the ellipsometric data evaluation of DLC coatings

Combination of a global-search method with model selection criteria for the ellipsometric data... AbstractA method for the evaluation of experimental data from spectroscopic ellipsometry is proposed which combines the global-search optimization algorithm with statistical model selection criteria. The hybrid genetic-gradient search algorithm (HGGA) is applied to find the optical parameters and thickness of a diamond-like carbon (DLC) coating deposited on SW7M stainless steel. Akaike and Bayesian information criteria are used to evaluate the different dielectric function models. The method is able to find optical model parameters even in case of a limited initial knowledge about the material optical constants. At the same time, the optimal dielectric function model for the description of the material optical properties can be selected unambiguously from the set of candidate models. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Advanced Optical Technologies de Gruyter

Combination of a global-search method with model selection criteria for the ellipsometric data evaluation of DLC coatings

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References (12)

Publisher
de Gruyter
Copyright
© 2022 Walter de Gruyter GmbH, Berlin/Boston
ISSN
2192-8584
eISSN
2192-8584
DOI
10.1515/aot-2022-0014
Publisher site
See Article on Publisher Site

Abstract

AbstractA method for the evaluation of experimental data from spectroscopic ellipsometry is proposed which combines the global-search optimization algorithm with statistical model selection criteria. The hybrid genetic-gradient search algorithm (HGGA) is applied to find the optical parameters and thickness of a diamond-like carbon (DLC) coating deposited on SW7M stainless steel. Akaike and Bayesian information criteria are used to evaluate the different dielectric function models. The method is able to find optical model parameters even in case of a limited initial knowledge about the material optical constants. At the same time, the optimal dielectric function model for the description of the material optical properties can be selected unambiguously from the set of candidate models.

Journal

Advanced Optical Technologiesde Gruyter

Published: Dec 1, 2022

Keywords: data evaluation; genetic algorithm; information criteria; spectroscopic ellipsometry

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