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K-edge and Ross filters techniques were used to measure quantitatively the X-ray emission from laser heated Al, Mo, and Ta plasmas in the range of 10 to 100 keV. The INRS Table Top Terawatt laser system using Chirped Pulse Amplification technique supplied a focused laser pulse of about 300 mJ in...
Reflection topographs of annealed Czochralski-grown silicon wafers are made with synchrotron white beam radiation at grazing angles of 0.2 degree to 3 degree. Information on the uniformity of the denuded zone is obtained from a number of grazing incidence topographs, which according to...
The concept of X-UV Lamellar Multilayer Amplitude Grating (LMAG) is introduced and a method of fabrication is given. Dynamical and kinematic theories of the diffraction by a LMAG are presented. Different applications of the LMAGs are considered. The first one is the achievement of a narrow...
A new action constant for bremsstrahlung has been derived and published by the author (Journal of X-Ray Science and Technology 6, 1996, 261). Experimental confirmation of that action constant by measurements of the intensity of bremsstrahlung produced by electron beams on pure metal targets, has...
The paper deals with the application of soft X-ray optics to the enhancement of the efficiency of X-ray proximity lithography based on a point X-ray source. The grazing incidence X-ray collimators are shown to increase the efficiency coefficient in several hundreds times. The design of the...
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