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Abstract.Background: As an important optical element, concave microlens arrays are utilized in many applications. How to fabricate a mass of concave microlens arrays efficiently at a low cost is a key problem to be solved.Aim: We propose a method of fabricating a concave microlens array based on...
Abstract.This paper presents a proof-of-concept for microelectromechanical system (MEMS)-based fixed cavity Fabry–Pérot interferometers (FPIs) operating in the long-wavelength infrared (LWIR, 8 to 12 μm) region. This work reports for the first time on the use of low-index BaF2 thin films in...
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